METAL COMPOUND, CHEMICAL VAPOR DEPOSITION MATERIAL CONTAINING THE SAME, AND METHOD FOR PRODUCING METAL-CONTAINING THIN FILM,申请号KR20107009857-传众专利搜索

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发明名称	METAL COMPOUND, CHEMICAL VAPOR DEPOSITION MATERIAL CONTAINING THE SAME, AND METHOD FOR PRODUCING METAL-CONTAINING THIN FILM
摘要
申请公布号	KR20100106950(A)	申请公布日期	2010.10.04
申请号	KR20107009857	申请日期	2008.10.22
申请人	ADEKA CORPORATION	发明人	YAMADA NAOKI;YOSHINAKA ATSUYA;WADA SENJI
分类号	C07F7/00;C07F7/28;C23C16/34	主分类号	C07F7/00
代理机构		代理人
主权项
地址

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