发明名称 |
Data preparation for multiple mask printing |
摘要 |
A method for preparing data to create two or more masks required to print a desired feature pattern with a multiple mask technique. In one embodiment of the invention, a target feature pattern is separated into two or more groups or data layers with a coloring algorithm. Coloring conflicts or adjacent features that are within a predetermined distance of each other and are assigned to the same group or data layer are identified. Cutting boxes are added to a feature to divide a feature into two or more smaller features. A coloring algorithm is re-applied to the layout including the cutting boxes to assign the features into different groups or data layers. Data in each group or data layer is used to define a mask to print the target feature pattern.
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申请公布号 |
US7802226(B2) |
申请公布日期 |
2010.09.21 |
申请号 |
US20070621077 |
申请日期 |
2007.01.08 |
申请人 |
MENTOR GRAPHICS CORPORATION |
发明人 |
PARK JEA-WOO;SAHOURIA EMILE Y. |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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