摘要 |
A plurality of non-volatile memory cell units are arranged in rows and columns in a single crystalline semiconductor substrate of a first conductivity type. Each cell unit has a first region of a second conductivity type in the substrate along the planar surface, and a second region of the second conductivity, spaced apart from the first region, with a channel region therebetween. The channel region has a first portion adjacent to the first region, a third portion adjacent to the second region and a second portion therebetween. A first and second floating gates are over the first portion and third portion respectively and are insulated therefrom. A first and second control gates are over the first and second floating gates respectively and are capacitively coupled thereto. A first and second erase gates are over the first and second regions respectively and are insulated therefrom. A word line is over the second portion and is insulated therefrom. Electrical contacts to the array are made along the extremities of the array.
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