发明名称 Manufacturing method of semiconductor device, manufacturing method of display device, semiconductor device, display device, and electronic device
摘要 A method for manufacturing a semiconductor device provided with a circuit capable of high speed operation while the manufacturing cost is reduced. A method for manufacturing a semiconductor device which includes forming an ion-doped layer at a predetermined depth from a surface of a single-crystal semiconductor substrate and forming a first insulating layer over the single-crystal semiconductor substrate; forming a second insulating layer over part of an insulating substrate and forming a non-single-crystal semiconductor layer over the second insulating layer; bonding the single-crystal semiconductor substrate to a region of the insulating substrate where the second insulating layer is not formed, with the first insulating layer interposed therebetween; and forming a single-crystal semiconductor layer over the insulating substrate by separating the single-crystal semiconductor substrate at the ion-doped layer which acts as a separation surface so that the ion-doped layer is separated from the insulating substrate.
申请公布号 US7799620(B2) 申请公布日期 2010.09.21
申请号 US20080078093 申请日期 2008.03.27
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 HONDA TATSUYA
分类号 H01L21/00;G02F1/1345;G02F1/1368;H01L21/02;H01L21/20;H01L21/265;H01L21/336;H01L21/84;H01L27/12;H01L29/786 主分类号 H01L21/00
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