| 发明名称 |
Shower plate having projections and plasma CVD apparatus using same |
| 摘要 |
A shower plate 122 has protrusions 22 formed on the front face used with a first electrode in a plasma CVD apparatus. A plane-surface portion 23 is left around apertures of gas inlet holes 21 formed in the shower plate 122. With protrusions 22 being formed, a surface area of the first electrode is increased.
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| 申请公布号 |
US7799134(B2) |
申请公布日期 |
2010.09.21 |
| 申请号 |
US20050061986 |
申请日期 |
2005.02.18 |
| 申请人 |
ASM JAPAN K.K. |
发明人 |
TSUJI NAOTO;FUKUDA HIDEAKI;ARAI HIROKI;MORISADA YOSHINORI;KOBAYASHI TAMIHIRO |
| 分类号 |
H01L21/00;H05H1/46;C23C16/00;C23C16/34;C23C16/44;C23C16/455;C23C16/509;H01J37/32;H01L21/31 |
主分类号 |
H01L21/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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