| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-sensitive vibrating gyroscope with the acceleration noise reduced. <P>SOLUTION: This is the integrated microelectromechanical structure 30 comprising a driving mass 3 designed so as to be fixed on substrate with an elastic fixed element 8a' and subjected to driven motion on xy within a plane, and both the first sensing mass 15a and second sensing mass 15b suspension-supported inside the driving mass 3 and combined with the driving mass 3 by each elastic fixed element 18, respectively, so as to be fixed on the driving mass 3, as well as, make each detecting motion, in response to angular velocity. Especially, these first sensing mass 15a and second sensing mass 15b are mutually combined by elastic combining elements 32a/32b so as to combine own vibration modes. <P>COPYRIGHT: (C)2010,JPO&INPIT |
