| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric element having stabilized high piezoelectric characteristics and an inkjet type recording head employing the piezoelectric element by a method by which the degree of orientation which is suitable for a piezoelectric thin film is obtained stably with excellent reproductivity. <P>SOLUTION: A Ti film is formed on a lower electrode 42, and thereafter, a piezoelectric layer which constitutes a piezoelectric thin film 43 is formed a plurality of times, and an upper electrode 44 is formed on the piezoelectric thin film 43 to manufacture the piezoelectric element 40. When forming the film of the piezoelectric layers a plurality of times, a calcining temperature at first film forming is specified so as to be higher than a calcining temperature at each time of film forming. Furthermore, the calcining time at initial film forming is specified so as to be longer than the calcining time at each film formation in the other time. By this method, the degree of 100-surface orientation is improved and the oxidation or the diffusion of Pb of the lower electrode can also be prevented. <P>COPYRIGHT: (C)2011,JPO&INPIT |
