| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To perform a highly accurate factor analysis of fault occurrence even in a production process where a sufficient number of sets of inspection data can not be obtained. <P>SOLUTION: A data collection section 3 obtains various kinds of measured values associated with each process device from each process device X1, X2, ..., A1, A2, ..., comprising each manufacturing process X, A, ..., of a production process 1. A prediction calculation section 4 calculates the predicted values (inspection predicted values) of inspection measured values in an inspection process C on the basis of the various kinds of measured values of the process devices A1, A2, ... obtained. A factor analysis section 5 performs the factor analysis of fault occurrence with the inspection predicted values as objects to be analyzed. Thus, even if the number of inspection measured values subjected to actual measurement is not enough as the inspection process C for performing sampling inspection, a sufficient number of objects to be analyzed are ensured so as to perform a highly accurate factor analysis by setting the inspection predicted values in the inspection process C relating to all products which have passed the manufacturing process A as the objects to be analyzed of the factor analysis. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
