发明名称 LDMOS using a combination of enhanced dielectric stress layer and dummy gates
摘要 First example embodiments comprise forming a stress layer over a MOS transistor (such as a LDMOS Tx) comprised of a channel and first, second and third junction regions. The stress layer creates a stress in the channel and the second junction region of the Tx. Second example embodiments comprises forming a MOS FET and at least a dummy gate over a substrate. The MOS is comprised of a gate, channel, source, drain and offset drain. At least one dummy gate is over the offset drain. A stress layer is formed over the MOS and the dummy gate. The stress layer and the dummy gate improve the stress in the channel and offset drain region.
申请公布号 US7824968(B2) 申请公布日期 2010.11.02
申请号 US20060488117 申请日期 2006.07.17
申请人 CHARTERED SEMICONDUCTOR MANUFACTURING LTD 发明人 CHU SANFORD;LI YISUO;ZHANG GUOWEI;VERMA PURAKH RAJ
分类号 H01L21/332;H01L21/336 主分类号 H01L21/332
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