| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of having a lighter-weight substrate table, adjusting the substrate table so as to have a flat shape, and maintaining the flatness of the substrate table. <P>SOLUTION: The substrate processing apparatus includes the substrate table having a placement surface on which a substrate is placed, a substrate processing unit that performs predetermined processing on the substrate placed on the placement surface of the substrate table, and a table adjusting and supporting unit that supports the substrate table. The table adjusting and supporting unit adjusts the flatness of the substrate table so that the placement surface of the substrate table has a flat shape. <P>COPYRIGHT: (C)2011,JPO&INPIT |
