<P>PROBLEM TO BE SOLVED: To provide a protective apparatus which suppresses torsion of a thin film portion. <P>SOLUTION: The protective apparatus protects a predetermined area of a surface of a substrate. The protective apparatus includes: a frame portion which includes a pair of flexible portions facing each other arranged along a first direction, and is connected to the surface of the substrate to enclose the circumference of the predetermined area; and a thin film portion which is stretched over the frame portion to face the surface of the substrate and blocks an opening formed by the frame portion. The flexible portions includes an end surface on the thin film side having a curved shape concaved toward the connected side with the substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT
