发明名称 METHOD AND APPARATUS FOR MEASURING DISSOLVED SUBSTANCE CONTENT IN LIQUID, AND ETCHING-SOLUTION REPRODUCING SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a method and an apparatus, capable of precisely measuring the content of a dissolved substance in liquid and conducting the measurement easily, in an in-line of a process that uses the liquid. SOLUTION: The apparatus includes an optical section 1, which brings light R1 from a light source 31 to enter the boundary surface 32b of a prism 32 forming an interface with the liquid 35 and detects a reflectivity of reflection light R2 from the prism boundary surface 32b; and a data processing section 2, which computes the dissolved substance content in the liquid 35, based on a detection signal of the optical section 1. In the data processing section 2, an absorbance (reflection intensity) is computed, on the basis of a signal corresponding to a reflection amount of reflection light R3 which is output from a light receiving element 33 and then the dissolved substance content in the sample liquid (the liquid) is computed, on the basis of the computed absorbance and calibration curve formula. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010261793(A) 申请公布日期 2010.11.18
申请号 JP20090112283 申请日期 2009.05.01
申请人 KURABO IND LTD 发明人 AZUMA NOBORU;KARIYAMA NAOMI
分类号 G01N21/27;G01N21/33;H01L21/306 主分类号 G01N21/27
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