| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology related to mounting of a sheath heater in which heat dissipation of an extended part from the heated part to the end side can be promoted and flexibility of that part is not damaged, and superior workability can be obtained. SOLUTION: This has a structure in which the sheath heater 1 that is constituted by housing an exothermic wire in at least a part inside a metallic outer cylinder 10 is mounted on a vacuum device 9 which becomes a heating objective. The exothermic portion 3 having the exothermic wire of the sheath heater 1 is fixed to a uniform hot plate 91 that is the heated part 5 of the vacuum device 9, a metallic coil spring 2 of a different member is installed along a prescribed region R in the axial direction on the outer cylinder 10 of the sheath heater 1 terminal side extended from the uniform hot plate 91 (heated part 5), and by this, the heat dissipation of the extension part 4 where reduction in the surface temperature is desired can be promoted. COPYRIGHT: (C)2011,JPO&INPIT
|
