| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration measuring instrument for simultaneously measuring vibration information at a plurality of points on a measurement object comprising minute components having a movable part, without complicated optical axis adjustment. SOLUTION: The vibration measuring instrument includes: a light source section 10 emitting reference light and measuring light which are spectra with predetermined frequency intervals, having different modulation frequencies and center frequencies from each other, and being mutually phase-synchronized and coherent; a measuring optical system dividing the measuring light emitted from the light source section 10 for each frequency component and irradiating the plurality of points on a measuring surface 59 of the measurement object comprising the minute components having the movable part through a microscopic optical system; a head section 50 having a reflecting optical system for entering the measuring light into the measuring optical system and overlapping the reference light and the measuring light reflected from the measuring surface 59 and entered through the microscopic optical system; a detecting section 30 detecting an interference signal based on the lights overlapped by the reflecting optical system; and a signal processing section 70 analyzing the vibration information at the plurality of points on the measuring surface 59 based on the detected interference signal. COPYRIGHT: (C)2011,JPO&INPIT
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