| 摘要 |
PURPOSE: An adapter unit embedded loader chamber is provided to hold a plurality of wafers between a automatic rail-guided-vehicle(RGV) and a prober chamber. CONSTITUTION: A container, which is installed at an arranging part, contains a plurality of wafers. A transferring unit is arranged between the container and a processing chamber to transfer the wafers. An automatic RGV transfers the wafers to the different position from the arranging part. An adapter unit(30) functions as a buffer table. The adapter unit holds the wafers between the RGV and a prober chamber. |
