PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a technique capable of accurately detecting the pressure of a gas that may permeate a metal member by a pressure sensor including a metal member having a deep hole.SOLUTION: A pressure sensor 10 is used to detect the pressure of a gas. The pressure sensor 10 includes: a metal member 20 provided with a hole 21 which has an open end and a bottom at the other end, and to which the gas is introduced; and a pressure detection part 26 provided at a position on the outer surface of the metal member 20 to face the bottom surface of the hole 21. A permeation suppressing film 28 for suppressing permeation of the gas is formed at least on the bottom surface of the hole 21 by a vapor deposition method.