发明名称 |
Device for measuring the position of at least one structure on a substrate |
摘要 |
A device for measuring the position of at least one structure on a substrate is disclosed. The substrate to be measured is positioned in a mirror body. A flat insert is provided in the mirror body and is formed such that the substrate and the insert together always have the same optical thickness, irrespective of the mechanical thickness of the substrate.
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申请公布号 |
US7872763(B2) |
申请公布日期 |
2011.01.18 |
申请号 |
US20080286466 |
申请日期 |
2008.09.30 |
申请人 |
VISTEC SEMICONDUCTOR SYSTEMS GMBH |
发明人 |
PIETSCH KATRIN;ADAM KLAUS-DIETER;EHRENBERG TILLMANN |
分类号 |
G01B11/02;G01N21/01 |
主分类号 |
G01B11/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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