发明名称 Transistor gate electrode having conductor material layer
摘要 Various embodiments of the invention relate to a PMOS device having a transistor channel of silicon germanium material on a substrate, a gate dielectric having a dielectric constant greater than that of silicon dioxide on the channel, a gate electrode conductor material having a work function in a range between a valence energy band edge and a conductor energy band edge for silicon on the gate dielectric, and a gate electrode semiconductor material on the gate electrode conductor material.
申请公布号 US7871916(B2) 申请公布日期 2011.01.18
申请号 US20090553033 申请日期 2009.09.02
申请人 INTEL CORPORATION 发明人 MURTHY ANAND;BOYANOV BOYAN;DATTA SUMAN;DOYLE BRIAN S.;JIN BEEN-YIH;YU SHAOFENG;CHAU ROBERT
分类号 H01L21/00;H01L21/28;H01L21/8234;H01L21/8238;H01L29/10;H01L29/49 主分类号 H01L21/00
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