DYNAMIC MODE AFM APPARATUS

摘要

There is provided a dynamic mode AFM apparatus that configures an automatic control system which can automatically obtain a probe-sample distance, and allows high-speed identification of atoms of the sample surface. The dynamic mode AFM apparatus comprises: a scanner 3 for performing three-dimensional relative scanning of a cantilever 2 and a sample 1; a means 8 for generating an AC signal of a resonance frequency in a mode with flexural vibration of the cantilever 2; a means 9 for exciting the flexural vibration of the cantilever 2 with the resonance frequency; a means 10 for generating an AC signal of a second frequency which is lower than the frequency of the flexural vibration; a means 11 for modulating a probe 2A-sample 1 distance of the cantilever 2 with the second frequency; a means 5 for detecting fluctuation of the resonance frequency; a means 4 for detecting vibration of the cantilever; and a means 6 for detecting a fluctuation component which is contained in a detected signal by the means 5 for detecting the resonance frequency fluctuation and synchronized with a modulation signal of the probe 2A-sample 1 distance, wherein an inclination of the resonance frequency against the probe 2A-sample 1 distance is obtained from the strength and polarity of the fluctuation component.