| 摘要 |
PROBLEM TO BE SOLVED: To reduce the size of inspection device for reducing installation area thereof.SOLUTION: A stage 10 having a substrate 1 mounted thereon is provided with a plurality of blocks 12 supporting a bottom surface of the substrate 1 at a predetermined distance in a direction perpendicular to a scanning direction of inspection light, thereby forming grooves in the scanning direction of the inspection light among the blocks 12. The stage 10 and an optical system having a light projection system and a light-receiving system are moved in mutually opposite directions; while the stage 10 and the optical system are concurrently moved, the belt-like inspection light having a cross-sectional length L, which is shorter than the distance between the blocks 12, is emitted obliquely from the light projection system to a portion of the substrate 1 mounted onto the stage 10 and not supported by the blocks 12 along the scanning direction of the inspection light, thus the substrate 1 is scanned by the inspection light. |
