| 摘要 |
PROBLEM TO BE SOLVED: To detect relative displacement of a magnetic sensor and to improve the mechanical strength. SOLUTION: Grooves 11a are formed at fixed intervals in the surface of a magnetic metal member 11; a conductive mixture material 12 consisting of a mixture of copper or a conductive material having conductivity equal to or higher than the copper and a thermal spray material harder than copper is embedded in the grooves 11a by thermal spraying, and the entire surface is covered with a surface reinforcing material 13 by thermal spraying. By detecting the difference in the eddy current loss and magnetic resistance between a region of the groove 11a and an area outside the groove 11a by a magnetic sensor D, relative displacement for the magnetic sensor D can be detected. Since the groove 11a is filled with the conductive mixture material 12 which is harder than copper by thermal spraying, mechanical strength can be improved. Since the entire surface is covered with the surface-reinforcing material 13 which is harder than copper by thermal spraying, the mechanical strength is improved. COPYRIGHT: (C)2011,JPO&INPIT
|
