发明名称 Film bulk acoustic resonator shaped as an ellipse with a part cut off
摘要 An object is to provide a film bulk acoustic resonator capable of improving resonant characteristics by reducing the generation of a standing wave to be caused by a transverse-mode acoustic wave to a minimum. In a film bulk acoustic resonator including a resonant portion A having a piezoelectric material layer 3 sandwiched between a first electrode 2 and a second electrode 4, the resonant portion A is configured to have a planar shape that is an ellipse having a part thereof cut off along a straight line L. The straight line L intersects at least one of a minor axis and a major axis of the ellipse, and preferably intersects both the minor axis and the major axis, and passes through the center of the ellipse.
申请公布号 US7889027(B2) 申请公布日期 2011.02.15
申请号 US20060066317 申请日期 2006.07.05
申请人 SONY CORPORATION 发明人 OKA SHUICHI;OHNO TERUKAZU
分类号 H03H9/13;H03H9/17;H03H9/54 主分类号 H03H9/13
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