SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE: A substrate processing apparatus is provided to implement the treatment process of a substrate using one load lock chamber even if a problem occur in one of two load lock chambers. CONSTITUTION: A cassette module(10) loads and unloads the cassette on which a plurality of substrates is mounted. The loadlock chambers(30, 40) comprises a pair of loaders arranged in horizontal direction with space from each other. A atmosphere transport module(20) transfers the substrate between the cassette module and the loadlock chamber. A plurality of process modules(60) processes the substrate.