| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a small and inexpensive driver for an equivalent-capacity type actuator. <P>SOLUTION: An electrostatic actuator is provided with a high-voltage amplifier 51 supplying a voltage to a plurality of electrode pairs 811-812, 813-814, 815-816 and 817-818 and a control circuit 52 controlling the voltage supplied from the high voltage amplifier 51 to the plurality of electrode pairs, and the number of high voltage amplifiers 51 is set to one or smaller than that of electrode pairs. Miniaturization and cost reduction become available by reducing the number of high-voltage amplifiers 51. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
