| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technology which improves thermionic emission efficiency from a cathode in a high output electron gun. <P>SOLUTION: The electron gun 10 has a case 11. A cathode member 31, a heating device 32, and an anode electrode 3 are arranged in the case 11. The cathode member 31 has a cathode electrode 1 and a support member 5. A pin 15 is constructed of tungsten, and the cathode electrode 1 is constructed of tantalum. Since the cathode electrode 1 constructed of tantalum can obtain a necessary electron emission amount at a lower temperature than that of the cathode electrode 1 constructed of tungsten. Thus, when vacuum treatment is performed a plurality of times using the electron gun 10, a supporting side contact face does not become higher in temperature by radiation from the cathode electrode 1 or heat conduction from the cathode electrode 1 through the pin 15 than in the conventional case, and the pin 15 is not firmly fixed. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
