| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying apparatus capable of carrying a substrate out of a floating stage without stopping the transfer of the substrate, suppressing the occurrence of a transfer trace on a substrate-surface to be processed and improving a throughput. SOLUTION: The apparatus includes a floating conveyance part 2A for conveying a substrate G while being floated; and a roller conveyance part 2B disposed on a back stage and receiving the substrate from the floating conveyance part and conveying the substrate by using rollers. The floating conveyance part includes a floating stage 3 for floating the substrate, a guide rail 5 disposed on left and right sides of the floating stage in parallel to the floating stage and extending to left and right sides of the roller conveyance part; and a substrate carrier 6 provided so as to move along the guide rail and sucking and holding the edge of the substrate from below. The substrate is sucked and held by the substrate carrier, is conveyed along the guide rail, and when the tip of the substrate reaches the predetermined position of the roller conveyance part, sorption by the substrate carrier is released. COPYRIGHT: (C)2011,JPO&INPIT |
