发明名称 |
Method of establishing a lot grade system for product lots in a semiconductor manufacturing process |
摘要 |
A method of establishing a lot grading system for lots in a semiconductor manufacturing process includes defining a new lot grade for at least one lot in the semiconductor manufacturing process. The at least one lot is has a current lot grade and the new lot grade is dependent upon the current lot grade. The new lot grade is saved in a grading referenced database and the at least one lot in the semiconductor manufacturing process is updated with the new lot grade.
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申请公布号 |
US7908023(B2) |
申请公布日期 |
2011.03.15 |
申请号 |
US20080013642 |
申请日期 |
2008.01.14 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CRAWFORD EDWARD J.;SONG YUNSHENG;TING TSO-HUI |
分类号 |
G06F19/00;G01B3/44;G01B5/28;G01L1/00;G01N7/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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