| 摘要 |
PROBLEM TO BE SOLVED: To provide a low radiation film which can adjust a reflective color tone. SOLUTION: The low radiation film formed on a substrate by a vapor deposition process has a laminated structure where a dielectric layer and a metallic layer essentially consisting of Ag are laminated alternately by 2n+1 layer (n is an integer of≥1). The metallic layer is formed using a gaseous mixture composed of Ar and oxygen, and, regarding the gaseous mixture, the concentration of oxygen expressed by oxygen/(Ar+oxygen)×100 is 0.5 to 13 vol.%. COPYRIGHT: (C)2011,JPO&INPIT
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