| 摘要 |
PROBLEM TO BE SOLVED: To enhance detection sensitivity by increasing the light quantity per a unit area of the light incident on a light detection means. SOLUTION: In a particle size detection method for irradiating the liquid ET flowing through a pipeline KR with a coherent light HK so as to traverse the flow direction of the liquid and detecting the diffraction fringe produced by the particles contained in the liquid by light detection means SE1 and SE2, a prism 16, which divides the light HK traversing the pipeline KR to reflect the divided lights in different directions, is provided in a close vicinity to the pipeline KR and the reflected lights divided by the prism 16 are detected by a plurality of the light detection means SE1 and SE2 and the size of the particles is detected on the basis of the detection signals detected by the plurality of the light detection means SE1 and SE2. COPYRIGHT: (C)2011,JPO&INPIT |
