COATER

摘要

PROBLEM TO BE SOLVED: To suppress the shaking of a discharge part caused by the shaking of a pipe. SOLUTION: A coater 20 for applying a coating liquid on a substrate includes: a substrate holding part for holding the substrate; a main scanning direction guide part 42 extending along the main scanning direction X nearly parallel to the substrate; a main scanning mechanism having a slider 44 supported to be movable along the main scanning direction X by the main scanning direction guide part 42 in a state that an air layer is interposed between the slider 44 and the main scanning direction guide part 42; and the discharge part 50 supported to be movable along the main scanning direction X by the slider 44 to discharge the coating liquid to the substrate. Further, a pipe supporting member 60 movable along the main scanning direction X with the movement of the discharge part 50 is provided and the pipe 80 is connected to the slider 44 and the discharge part 50 in such a state that the middle of the pipe 80 is supported by the pipe supporting member 60. COPYRIGHT: (C)2011,JPO&INPIT