| 摘要 |
PROBLEM TO BE SOLVED: To provide a support structure for a conveying device, by which processing apparatuses unique to a product can be easily inserted or connected to be additionally installed. SOLUTION: The support structure for the conveying device 30 supports the conveying device 30 including a hand 32 for conveying a wafer to processing apparatuses 12, 12A, 12B, 12C which process the wafer, wherein guide rail members 68A, 68B, 68C that support the conveying device 30 movably are fixed to the processing apparatuses 12A, 12B, 12C which are additionally installed so that ends thereof are free ends, and when the plurality of the processing apparatuses 12, 12A, 12B, 12C are provided on a straight line, the guide rail members 68A, 68B, 68C fitted to the processing apparatuses 12A, 12B, 12C to be additionally installed have their ends mutually coupled by a guide coupling member 36 which is not fixed to the processing apparatuses 12, 12A, 12B, 12C. COPYRIGHT: (C)2011,JPO&INPIT |
