PLANARIZATION OVER TOPOGRAPHY WITH MOLECULAR GLASS MATERIALS

摘要

PROBLEM TO BE SOLVED: To provide a method of flattening on a topography using molecular glass materials.

SOLUTION: A flattened composition using molecular glass as a base for lithographic processing is disclosed. A process generally includes the steps of casting a planarizing composition containing at least one molecular glass and at least one solvent on a surface containing a lithographic structure and heating the flattened composition to a temperature higher than the glass transition temperature of at least one molecular glass. Exemplary molecular glass includes a polyhedral oligomeric silsesquioxane derivative, calixarene, a cyclodextrin derivative, and the other non-polymer macromolecules.

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