发明名称 ACTUATOR, LITHOGRAPHIC APPARATUS, AND METHOD OF CONSTRUCTING ACTUATOR
摘要 <P>PROBLEM TO BE SOLVED: To provide an actuator that improves heat dissipation of a coil and acquires a large output. <P>SOLUTION: An actuator includes a coil 3, a cooling body 5 configured to cool the coil 3, a quantity of heat transfer materials 8 fixedly arranged between the cooling body 5 and the coil 3, and a mechanical attacher 10 configured to attach the coil 3 to the cooling body 5. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011083180(A) 申请公布日期 2011.04.21
申请号 JP20100198718 申请日期 2010.09.06
申请人 ASML NETHERLANDS BV 发明人 KOOPS RODY;VOSTERS PETRUS MATTHIJS HENRICUS;STADHOUDERS FRANCISCUS
分类号 H02K3/24;H01L21/027 主分类号 H02K3/24
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