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发明名称
半导体基板电浆处理装置用反应室容器
摘要
申请公布号
申请公布日期
2011.05.11
申请号
TW097303936
申请日期
2008.07.08
申请人
日立国际电气股份有限公司
发明人
坂田雅和
分类号
1599
主分类号
1599
代理机构
代理人
何金涂 台北市大安区敦化南路2段77号8楼;王彦评 台北市大安区敦化南路2段77号8楼
主权项
地址
日本
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