PROXIMITY EXPOSURE APPARATUS, METHOD FOR LOADING AND UNLOADING SUBSTRATE IN PROXIMITY EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING PANEL SUBSTRATE FOR DISPLAY

摘要

PROBLEM TO BE SOLVED: To prevent damages on a substrate, when there is an abnormality at loading and unloading of the substrate by the use of a plurality of push-up pin units, each having a push-up pin and a motor for vertically moving the push-up pin, by making motors of all push-up pin units stop rapidly.

SOLUTION: A plurality of push-up pin units are divided into a plurality of groups. Each synchronized control circuit 60 detects an abnormal signal generated by the motor 11 of each push-up pin unit within the group. When the control circuit detects an abnormal signal from the motor 11 of at least one push-up pin unit in the group, the control circuit stops the motors 11 of all push-up pin units in the group and informs other synchronized control circuits 60 of the abnormality via a communication cable 52; additionally, when the control circuit receives abnormality information from other synchronized control circuits 60 via the communication cable 52, the control circuit stops the motors 11 of all push-up pin units within the group.

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