| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a MEMS capacitor microphone of which the sensitivity and the SN ratio are high, the device configuration is simple, which does not require an effort for assembling, and is low in cost by reducing electromagnetic noise, and lowering parasitic capacitance. <P>SOLUTION: The MEMS capacitor microphone has: a MEMS electroacoustic transducer provided with a semiconductor substrate, a first well area which is formed around an opening formed on the semiconductor substrate and is of an opposite conduction type of the semiconductor substrate, a second well area which is formed on the semiconductor substrate, a lower electrode which is provided in the first well area, supported by an insulating film to be provided on the first well area around the opening and faces the opening, and an upper electrode which faces the lower electrode via a gap; and a semiconductor amplifier provided in the second well area where the first well area and an output of the semiconductor amplifier are electrically connected to each other. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
