| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for attaching a pellicle, for preventing a pellicle film from bulging as well as preventing particles from entry upon attaching a pellicle to a photomask. <P>SOLUTION: The method for attaching the pellicle includes a step of supporting a mask (13) as extending in a vertical direction in a clean room (1) and a step of disposing a pellicle (23) so as to oppose to the pattern face of the mask. Then the pellicle is press-fitted to the mask while heated clean air is made to flow as a down flow almost parallel to the mask from the ceiling side of the clean room to the floor. The volume of the heated clean air sealed in the pellicle space contracts in a succeeding cooling step, which prevents the pellicle film from bulging. The pellicle film can be also prevented from bulging by changing directions of the down flow by a flow straightening plate (30) provided in a pellicle holding device so as to allow the down flow to collide with the pellicle film. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
