| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem wherein, when depending on a series of simple boundary provision wafer approval tests, an MOSFET parameter is reduced in accuracy relative to a system-on-chip embedding MOSFET monitor due to context dependency influence and a local variation incapable of being monitored from a distant location where a wafer monitor is installed. SOLUTION: An integrated circuit 2 includes one or more monitoring circuits 14, 16, 18, 20 in the form of ring oscillators 22. Each of the ring oscillator 22 includes a plurality of tristate inverters 24, 26, 28 including a current-limiting transistor 42 operating in a leakage mode. The leakage current passing through the transistor 42 is dependent upon an operating parameter of the integrated circuit 2 being monitored. Accordingly, the oscillation frequency F<SB>osc</SB>of the ring oscillator 22 varies in dependence upon the operating parameter to be measured. COPYRIGHT: (C)2011,JPO&INPIT |
