晶圆处理用加热器组件,申请号TW098306285U01-传众专利搜索

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发明名称	晶圆处理用加热器组件
摘要
申请公布号	TWD139310	申请公布日期	2011.06.11
申请号	TW098306285U01	申请日期	2009.12.25
申请人	東京威力科創股份有限公司日本	发明人	田中澄日本
分类号	15-99	主分类号	15-99
代理机构		代理人	台北市中山区南京东路2段125号7楼台北市中山区南京东路2段125号7楼
主权项
地址	日本

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