| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical deflector in which tensile forces are generated in movable beams which support a movable part, and sinking is prevented. SOLUTION: The optical deflector includes a substrate, the movable part, a pair of supporting parts and a pair of movable beams. The movable part has a frame shape forming at least one open part. Each supporting part is fixed on the substrate and stretches upward from the substrate. The pair of supporting parts are separated from each other interposing a space and disposed in the open part. Each movable beam connects the corresponding supporting part and the inner peripheral face of the open part of the movable part. The pair of the movable beams stretch on the same straight line parallel to the surface of the substrate, and rockingly support the movable part around the straight line. At least in a section of the frame shaped movable part which is stretched along the space, a low thermal expansion part formed of a material which has a thermal expansion rate smaller than that of the substrate exists. COPYRIGHT: (C)2011,JPO&INPIT
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