| 摘要 |
PROBLEM TO BE SOLVED: To obtain trichlorosilane with little impurities by efficiently removing a metal silicon powder, its oxide and the components of the impurities from a reaction fluid. SOLUTION: In an apparatus 1 for producing trichlorosilane where the metal silicon powder supplied into a reaction furnace 2 is reacted with hydrogen chloride gas while fluidizing and trichlorosilane produced by this reaction is taken out while purifying, a trichlorosilane purifying system 5 connected to the reaction furnace 2 has: a coarse particle separating means 21 where coarse particles in the reaction fluid containing trichlorosilane discharged from the reaction furnace 2 are separated and collected; a coarse particle recovering system 25 where the coarse particles collected by the coarse particle separating means 21 are returned into the reaction furnace 2; and a filter 27 to remove minute particles in the reaction fluid passed through the coarse particle separating means 21. COPYRIGHT: (C)2011,JPO&INPIT
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