| 摘要 |
PROBLEM TO BE SOLVED: To provide a noncontact displacement measuring apparatus that facilitates detecting a displacement of a workpiece in a short time. SOLUTION: The noncontact displacement measuring apparatus includes: a measurement table 13 allowing the workpiece 12 to be placed thereon; first to third laser probes 35a to 35c measuring the displacement of the workpiece 12; and a first gate-shaped drive section 14A relatively movable from the measurement table 13 along a Y-axis, extended in a Z-axis direction, and having a gate shape having ends thereof located on both edges of the measurement table 13 in an X-axis direction. The first to third laser probes 35a to 35c irradiate the workpiece 12 with light, receives reflected light based on the light, and measures the displacement of the workpiece 12 based on the reflected light. The first gate-shaped drive section 14A has the first to third laser probes 35a to 35c arranged so as to irradiate the workpiece 12 with the light from at least two directions. COPYRIGHT: (C)2011,JPO&INPIT
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