| 摘要 |
PROBLEM TO BE SOLVED: To improve throughput by shortening a cycle time up to starting carrying from carrying-in of a substrate, in a substrate carrying device for flatly flowing and carrying a processing object substrate one by one in a singled sheet system. SOLUTION: This substrate carrying device includes a floating stage 3 for floating the processing object substrate G, a pair of guide rails 5 arranged in parallel on the right-left sides of the floating stage, a plurality of substrate carriers 6 respectively movably arranged along the pair of guide rails and capable of sucking-holding an edge part of the substrate from below, an alignment means 7a arranged so as to freely advance-retreat up to a predetermined position from a standby position to the carried-in substrate in a substrate carrying-in position H of the floating stage and arranging the substrate in the predetermined position by contacting with the substrate, a substrate support means 8 for supporting the substrate arranged in the predetermined position by the alignment means from below the substrate in the substrate carrying-in position of the floating stage, and a control unit 50 for controlling the operation of the substrate carriers, the alignment means and the substrate support means. COPYRIGHT: (C)2011,JPO&INPIT
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