| 摘要 |
An antenna ratio calculation section extracts components from which two or more independent metal wires are coupled to one of diffusion layer regions based on layout data read from a layout data accumulation section, determines, for each of the components, the area of each of the two or more independent metal wires and electrodes coupled to the respective metal wires, determines an antenna ratio between the area of each of the metal wires and the area of the electrode coupled to the metal wire, and determines a moderation value for moderating a design standard associated with plasma charge damage related to one of the metal wires based on the ratio of the total area of all the metal wires coupled to the one of the diffusion layer regions to the area of the one of the metal wires.
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