| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction member for sucking and holding a body to be sucked, wherein particle generation is minimized.SOLUTION: A suction member 10 is so formed as to have many support protrusions 2 on the upper surface of a base 1, and each support protrusion 2 is formed to have a base 3 with a conical frustum-like shape and a small protrusion 4 on the center of its top surface, and on its top and side surfaces, a protective layer 5 is formed. This structure leads to the firm attachment of the protective layer 5 to the base 3, and therefore particles due to peeling off of the protective layer 5 can be reduced as much as possible. |
