发明名称 |
PLASMA LIGHT SOURCE AND PLASMA LIGHT GENERATION METHOD |
摘要 |
A plasma light source includes a pair of coaxial electrodes 10 facing each other, a radiation environment sustaining device 20 that supplies a plasma medium into the insides of the coaxial electrodes and holds the coaxial electrodes at a temperature and a pressure suitable for plasma generation, and a voltage application device 30 that applies a discharge voltage of an inverted polarity to each of the coaxial electrodes. Tubular discharge 4 is formed between the pair of coaxial electrodes and plasma 3 is confined in an axial direction of the coaxial electrodes.
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申请公布号 |
US2011248635(A1) |
申请公布日期 |
2011.10.13 |
申请号 |
US200913140789 |
申请日期 |
2009.12.04 |
申请人 |
TOKYO INSTITUTE OF TECHNOLOGY;IHI CORPORATION |
发明人 |
KUWABARA HAJIME;HORIOKA KAZUHIKO |
分类号 |
H05H1/40 |
主分类号 |
H05H1/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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