| 发明名称 |
CHOLATE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME |
| 摘要 |
New photoacid generator compounds (“PAGs”) are provided that comprise a cholate moiety and photoresist compositions that comprise such PAG compounds.
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| 申请公布号 |
US2011250537(A1) |
申请公布日期 |
2011.10.13 |
| 申请号 |
US20100965339 |
申请日期 |
2010.12.10 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
AQAD EMAD;LI MINGQI;MATTIA JOSEPH;XU CHENG-BAI |
| 分类号 |
G03F7/004;C07J9/00;G03F7/20 |
主分类号 |
G03F7/004 |
| 代理机构 |
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