发明名称 ENCODER
摘要 <P>PROBLEM TO BE SOLVED: To provide an encoder configured to improve reliability. <P>SOLUTION: The encoder includes: a scale (21) having a reference pattern connected to a support part (12) having a first moving shaft and provided on the basis of a second moving shaft, and a position information pattern provided on the basis of the reference pattern; a photoelectric conversion part (23) having a plurality of first photoelectric conversion elements which receive a first light via the reference pattern and output a first photoelectric conversion signal based on the first light, and a plurality of second photoelectric conversion elements which receive a second light via the position information pattern and output a second photoelectric conversion signal based on the second light; and a control part (24) which detects position information on the scale based on the second photoelectric conversion signal, and selects the second photoelectric conversion element corresponding to the position information on the scale based on the first photoelectric conversion signal. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2011220805(A) 申请公布日期 2011.11.04
申请号 JP20100089517 申请日期 2010.04.08
申请人 NIKON CORP 发明人 HIKICHI TETSUYA;YAMABE KIICHIRO;SHIBAZAKI KIYOSHIGE;YOMOTO MASAHIKO
分类号 G01D5/347 主分类号 G01D5/347
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