| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a mold using a metal mold having a small-area of fine concave and convex structure on its surface, capable of manufacturing a large-area mold with a high surface flatness by batch-type impartation and transfer. <P>SOLUTION: The method includes: a first transfer step for forming a fine concave and convex structure part 36 by making a center of a fine concave and convex part 33 approximately coincide with a center of an opening 37a, using a mask 37 having the opening 37a similarly smaller than an area of the fine concave and convex part, after the fine concave and convex part 33 of a metal mold 32 is filled with a photo-curing resin, and exposing and hardening them; and a second transfer step for forming a fine concave and convex structure part 43 by making a center of the fine concave and convex part 33 approximately coincide with a center of an opening 42a, using a mask 42 having the opening 42a similarly smaller than an area of the fine concave and convex part 33, after the metal mold 32 is arranged so that a boundary 33a of the fine concave and convex part 33 is adjacent to an end of the fine concave and convex structure part 36 formed in the previous step, and exposing and hardening them. <P>COPYRIGHT: (C)2012,JPO&INPIT |
