| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating apparatus which can prevent the damage to a pattern etc. formed on a substrate, such as electrostatic breakdown, from causing by preventing the substrate from being charged when coating liquid is applied thereon. <P>SOLUTION: The coating apparatus includes a stage 41 that supports the substrate 100 from a lower surface thereof, and a coating liquid supply part that applies the coating liquid to the substrate 100 by relatively moving with respect to the substrate 100 supported by the stage 41. The coating apparatus further includes a slit nozzle 42 that is composed of metal and applies the coating liquid, and a support member 44 that supports the slit nozzle 42 through an insulator 35. <P>COPYRIGHT: (C)2012,JPO&INPIT |
